摘要
将频闪成像技术和相移显微干涉技术相结合,提出了一种基于面内补偿的微机电系统(MEMS)离面运动测试方法。首先通过相移显微干涉技术自动采集MEMS结构运动周期内不同准静态位置处的数帧相移干涉图像;然后通过图像处理得到每个准静态位置的亮场图像,进行面内位移测试;最后利用面内位移测试结果对离面位移测试进行补偿,即双相位展开算法,完成对于MEMS结构的离面运动测试。实验结果表明:面内运动的测试的精度可达0.01 pixel,静态离面高度测试的重复精度可达0.52 nm,可以完成伴随着面内位移的MEMS离面位移测试。
Combining stroboscopic imaging and phase-stepping microscopic interferometry, a miero-elec- tromechanical system （MEMS） out-of-plane measuring method based on compensation of in-plane motion is established. First, it can automatically acquire interferograms at different quasi-static positions in moving periods of MEMS structures with phase-stepping microscopic interferometry technology. Then, bright-field images at different quasi-static positions can be gained from interferograms by image processing to measure in-plane motions of MEMS structures. Finally,out-of-plane motions of MEMS struc- tures can be compensated by in-plane tests results, called as double-phase unwrapping, to complete measurements of MEMS out-of-plane motions. Experimental results indicate that the measuring resolution of in-plane tests is u to 0.01 pixel,and the measuring repetition of static out-of-plane tests is 0. 52 nm. It can satisfy the measuring requirements of MEMS out-of-plane motion along with in-plane motion.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2012年第2期310-314,共5页
Journal of Optoelectronics·Laser
基金
天津市科技计划(11JCYBJC06300)
科技部国际科技合作与交流专项(2008DFA71610)
国家自然科学基金重点项(60723004),国家自然科学基金面上项目(50675152)资助项目
关键词
微机电系统(MEMS)
频闪成像
相移显微干涉
双相位展开
micro-electromechnical system（MEMS）
stroboscopic imaging
phase-stepping microscopic interferometry
double-phase unwrapping
