摘要
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统,测量了谐振器的振动速度。在信号处理过程中,首先使用电路系统去除高频载波成分,然后基于Matlab平台,选取时频分析中的Wigner-Ville分布对采集进入计算机的多普勒信号进行分析。提取了其中的速度信息,并与用计数法处理的结果进行了比较。结果表明具有较好的效果。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems （MEMS）, and the vibration of a MEMS resonator has been measured. In the signal processing, removed by using a circuit, the high frequency carrier is first the Wigner-Ville distribution of time-frequency analysis is used to analyze the Doppler signal and extract the velocity. Compared with the result of the counting method, the time-frequency is more effective.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2007年第2期281-282,286,共3页
Optical Technique
基金
国家自然科学基金资助项目(50275108)
关键词
激光多普勒
微机电系统
时频分析
laser Doppler
micro-electro-mechanical systems
time-frequency analysis
