摘要
利用非平衡磁控溅射法在H13钢表面制备TiAlN镀层,将其在740℃的铝液中静态腐蚀4 h,研究镀层在铝液中的失效机理。用场发射扫描电子显微镜对失效部位进行形貌观察及能谱分析。结果表明:引起镀层失效主要是由于铝液通过镀层边界区或镀层缺陷处侵入镀层与基体的界面,且与基体材料发生了反应腐蚀,最终引起镀层的剥落而失效。镀层失效过程可分为铝液渗入阶段,缓慢腐蚀阶段,快速腐蚀阶段,镀层断裂剥落阶段这四个阶段。
TiAlN coatings were prepared by closed field unbalanced magnetron sputtering on the substrate of H13 steel. Coated samples were corroded statically for 4 h in mohen alunfinum at 740℃ to reveal the failure mechanism of TiAlN coating. SEM and EDS were used to examine the coatings＇ micmstructure and composition in failure parts. Results indicated that the reaction between substmte and molten aluminum was the key factor to cause delaminating of TiAlN coating. The molten aluminum intruded into the interface between substrate and film through the border or defects in coat-ings. The failure process could be divided into three stages listed as the stage of molten aluminum＇s invasion, molten alu-minum＇ s corrosion and the delaminating of coating.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2015年第3期290-294,共5页
Chinese Journal of Vacuum Science and Technology
基金
山西省回国留学人员科研资助项目(2013-048)
山西省自然科学基金项目(2012011021-4)
浙江省自然科学基金(Y4100385)
宁波市重点实验室基金(2007A22001)
宁波市择优资助科技项目(2009B10010)
关键词
磁控溅射
TiAlN镀层
铝液腐蚀
失效机理
Magnetic sputtering, TiAlN coating, Corrosion in aluminum, Failure mechanism
