摘要
采用多弧离子镀技术和Ti-Al合金靶及Zr单质靶的组合,在高速钢基体上制备了(Ti,Al,Zr)N多元N梯度硬质反应膜。分别用扫描电镜、X射线衍射仪观察测定(Ti,Al,Zr)N梯度膜膜层的表面、断面形貌、成分以及相结构,研究了(Ti,Al,Zr)N多元氮梯度硬质反应膜的组织结构和性能。结果表明,与TiN、(Ti,Al)N、(Ti,Zr)N及(Ti,Al,Zr)N等单层硬质膜相比,采用Ti-Al合金靶及单质Zr靶组合方式制备的(Ti,Al,Zr)N多元氮梯度硬质反应膜具有较高的硬度和膜/基附着力,硬度最高可达HV6000,膜/基附着力大于180 N。同时,膜层还具有良好的抗热震性能。
（Ti, Al, Zr）N multi-component hard films with N-gradient distributions were prepared by multi arc ion plating （MAIP） technology using the combined pure Zr and Ti-Al alloy targets. The surface and cross-fracture morphology, the surface compositions and the phase structure of the as-deposited films were observed and measured. The effects of bias voltage on the film quality, phase structure, the micro- hardness, the adhesion between film and substrate and the thermal shock resistance were investigated. In comparison with TiN, （Ti, Al）N and （Ti, Zr）N films, the as-deposited （Ti,Al,Zr）N films from the combination of pure Zr and Ti-Al alloy targets exhibited higher micro-hardness values even up to HV6000. Each of the as-deposited films has very high adhesion 180 N. The good heat shock resistance was also reached strength, in terms of critical load, larger than for each of the as-deposited films.
出处
《材料研究学报》
EI
CAS
CSCD
北大核心
2011年第1期89-94,共6页
Chinese Journal of Materials Research
基金
辽宁省高等学校优秀人才支持计划RC 05-05
沈阳市科技计划1091178-1-00资助项目~~
关键词
材料表面与界面
(Ti
AL
Zr)N膜
多弧离子镀
显微硬度
热震
surface and interface in the materials, （Ti, Al, Zr）N films, multi-arc ion plating,micro-hardness, thermal shock
