摘要
应用自行研制的软X射线反射率计,分别对不同的反射镜样品,在不同的工作波段以及掠射角下研究了软X射线波段掠入射光学表面的散射.实验结果表明:掠射角增加,波长减小,粗糙度增加,软X射线掠入射表面散射程度加重.
The soft X-ray scattering distributions of several mirrors were measured by a self-made soft X-ray reflectometer for different wavelengths and grazing angles.The experimental results indicated that the soft X-ray surface scattering increased with increasing grazing angle and surface roughness,but decreased with increasing wavelength.
出处
《物理实验》
2015年第1期5-9,共5页
Physics Experimentation
基金
哈尔滨工程大学实验教学改革与实验技术研究立项项目(No.SYJG20131106)
关键词
软X射线
表面散射
表面粗糙度
掠入射
soft X-ray
surface scattering
surface roughness
grazing incidence
