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杯形砂轮磨削氮化硅陶瓷表面形貌 被引量:1

Surface morphology of grinding of Si_3N_4 with cup grinding wheel
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摘要 磨削参数对工件表面加工质量有重要影响.杯形砂轮大切深缓进给端面磨削方法是一种高效、高精度硬脆材料加工方法.本文研究了利用此加工方法加工氮化硅陶瓷材料时,磨削深度参数与加工表面形貌之间的关系.利用一种非接触式白光干涉仪对工件表面形貌进行了测量和分析,发现随着磨削深度的增大,表面粗糙度无明显变化,而表面波纹度则受到显著影响. Grinding parameters affect the morphology of a machined surface. Creep-feed face grinding with a cup wheel is a highly efficient and highly precise grinding method for the manufacturing of hard and brittle materials. There is a trade-off between the rate of material removal and machining precision because substantial material removal necessitates a deep grinding depth that usually results in poor surface quality. The problem of how to machine a high-quality surface while maintaining a high removal rate is therefore important in precision grinding. This paper first introduces this grinding method. Si3N4 is an important engineering ceramic widely used in many fields, and to improve its ground surface quality, an experimental design is established to investigate the relationship between the grinding depth in this method and the ground surface morphology. Making a non-contact optical measurement, the surface morphology is derived and then analyzed. First, surface roughness is investigated for different grinding depths, showing that depth does not affect the surface roughness because the end face of the cup wheel has a regrinding effect. Second, the power spectrum density is investigated, showing that the peaks and valleys of the surface morphology are distributed with increasing intensity as grinding depth increases. Third, the machined surface's waviness is investigated, and is found to increase with the grinding depth. This is explained by the grinding force increasing with the depth, which intensifies the grinding machine's vibration. This paper reveals an important characteristic of this method in that the grinding depth has little effect on the roughness of the ground surface.
出处 《科学通报》 CAS CSCD 北大核心 2015年第3期316-321,共6页 Chinese Science Bulletin
基金 北京市科技计划(D131100002713001)资助
关键词 表面形貌 杯形砂轮 大切深缓进给磨削 粗糙度 波纹度 surface morphology, cup grinding wheel, creep-feed grinding, roughness, surface waviness
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