摘要
本文介绍和给出了扩散泵以及扩散喷射泵的主要尺寸、参数的设计与计算,并对抽气速率、蒸发面积及喷咀设置与返流率等问题进行探讨。最后对两种产品实例进行分析和计算,为产品设计、生产和改进提供参考和依据。
This paper introduces the design and calculation of main dimensions and parameters of diffusion pump and diffusion ejector pump. The volume flow speed, evaporation area and nozzle setting, as well as back-streaming rate were discussed. And the analysis and calculation of two kinds of product instances was carried out so as to provide basic reference for future product design, production and improvement.
出处
《真空》
CAS
2014年第6期15-20,共6页
Vacuum
关键词
扩散泵
扩散喷射泵
设计
计算
diffusion pump
diffusion ejector pump
design
calculation
