摘要
采用脉冲激光沉积方法,在（001）LaAlO3上沉积CaBaCo2O5＋δ多晶薄膜,用X射线衍射（XRD）和透射电子显微镜（TEM）对基体和薄膜的微观结构进行观察,并探讨了薄膜的生长机制以及改善薄膜质量的可能工艺。结果表明,（1）LaAlO3基体中存在位错、孪晶等缺陷,且孪晶类型以（100）楔形孪晶为主;（2）CaBaCo2O5＋δ薄膜为多晶薄膜,薄膜底部保留了薄膜生长过程中的初始晶粒结构,晶粒大小约5-8 nm,厚度约为5-7 nm。薄膜顶层的晶粒较大,约为11-16 nm。
CaBaCo2 O 5 ＋δ thin films were deposited on （001 ）LaAlO 3 substrates by pulsed laser deposition.The microstructures of the film and substrate were studied by X-ray diffraction （XRD）and of transmission electron microscopy （TEM）.Results show that （1 ）dislocations and twins appear in the LaAlO 3 substrates,and the （100）wedge-shaped twin was the main type;（2）CaBaCo2 O 5 ＋δ thin film was polycrystalline in nature,and the initial grain structure with a grain size of about 5-8 nm during growth was kept at the bottom of the film.While the grain size at the top of the film was larger,about 1 1-1 6 nm.Based on the observation results,a growth mechanism of the film was proposed.Possible processes to improve the film quality have also been discussed.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2014年第17期17050-17053,共4页
Journal of Functional Materials
基金
国家自然科学基金资助项目(51301064
51371081)
关键词
多晶薄膜
微观结构
薄膜生长方式
polycrystalline thin films
microstructure
growth mechanism
