摘要
论述了光刻在集成电路生产中的重要性 ,讨论了各种行之有效的光刻精度的保证方法 。
It discusses not only the importance of lithographic accuracy at IC process but also the effective guarantee ways of lithographic accuracy.Becides,it analyze the more ways which can improve lithographic accuracy.
出处
《微处理机》
2002年第2期23-26,共4页
Microprocessors
