摘要
对奥氏体不锈钢基体上采用离子束混合技术进行不同厚度的钨膜沉积 ,沉积后的试样进行了H+注入前后的XRD和SEM微观分析 ,研究了H+辐照对W膜的晶体结构和形貌的影响。结果表明 ,沉积的W膜基本上是非晶的 ,还出现了由于污染造成的钨的氧化物。氢离子的辐照模拟结果表明 ,少量晶化的W向非晶化转变 ,污染的氧化物被择优溅射掉。H+轰击对W膜表面形貌的影响不大 ,它仍然致密、均匀、完整且无明显损伤。
Tungsten films with different thickness were deposited by ion beam mixing techniques on the austenitic stainless steel. Microanalyses of XRD and SEM were measured for the deposited tungsten films before and after H + ion irradiation. The effect of the morphology and phase structure of the tungsten films by H + ion irradiation was studied. The results showed that the deposited tungsten films were nearly amorphous, and tungsten oxides were found due to the contamination of oxygen before H + ion irradiation. Simulation of H + ion irradiation on these films showed that a little crystalline tungsten was gradually transformed into amorphous and the contamination of WO 3 was significantly reduced by preferential oxygen sputtering. There is little difference between surface morphologies of tungsten films before and after H + ion irradiation. Tungsten films surfaces still showed dense, uniform, complete and no obvious damages after H + ion irradiation.
出处
《核技术》
CAS
CSCD
北大核心
2002年第4期267-271,共5页
Nuclear Techniques
基金
国家自然科学基金 (5 97810 0 2 )
高校博士学科点专项科研基金
中国科学院离子束研究重点实验室基金资助
