摘要
对离子束混合技术在不锈钢基体上沉积的W膜进行了H+ 辐照前后的XPS分析 ,研究了H+ 辐照对W的结合能的影响。分析结果表明 ,沉积的W膜中除了单质钨外 ,还有部分钨的氧化物 ,H+ 辐照结果表明 ,H+的辐照使钨的结合能向低能方向偏移 ;钨的氧化物有所减少 。
XPS was used to measure the elements in the ion beam mixing deposited tungsten films on stainless steel substrates before and after H + ion irradiation. The effect of H + ion irradiation on the binding energy of the element tungsten and tungsten oxides in the deposited tungsten films was investigated. The experiment results show that the binding energy of one part of tungsten component shifted to the lower side due to H + ion irradiation. It is found that the content of the tungsten oxides in the film was reduced by preferential oxygen sputtering after H + ion irradiation.
出处
《原子与分子物理学报》
CAS
CSCD
北大核心
2002年第1期41-44,共4页
Journal of Atomic and Molecular Physics
基金
国家自然科学基金 ( 5 97810 0 2 )
中国科学院离子束开放研究实验室资助项目
高校博士学科点专项科研基金
