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硅光子阵列波导光栅器件研究进展 被引量:3

Research Progress in Silicon Photonic Arrayed Waveguide Grating Devices
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摘要 硅光子阵列波导光栅(AWG)是实现硅基光子集成的重要器件。根据不同器件结构和材料介绍了该器件的研究进展。器件结构主要包括常规对称型、反射型、级联型和多模干涉仪(MMI)输入型。与常规对称型阵列波导光栅相比,反射型阵列波导光栅使器件尺寸更小;级联阵列波导光栅通道串扰性能更优越;MMI输入阵列波导光栅能获得平坦化输出光谱。硅材料具有高折射率,因此硅纳米线阵列波导光栅弯曲半径极小,器件更加紧凑;氮化硅阵列波导光栅具有良好的通道串扰和偏振性能。还介绍了温度和偏振不敏感阵列波导光栅,并对硅光子阵列波导光栅的未来发展趋势作出预测。 The silicon photonic arrayed waveguide grating (AWG)is an important device for achieving silicon-based photonic integration.We describe the research progress in the AWG based on different device structures and various materials.The device structure mainly includes conventional symmetric AWG,reflective AWG,cascaded AWG, and AWG with a multi-mode interferometer (MMI)aperture.Compared with the conventional symmetric AWG, the reflective AWGs have smaller footprint;the cascaded AWGs have better channel crosstalk performance;the MMI-AWGs can obtain a flattened spectrum response.The silicon nanowire AWG has a very small bending radius and makes devices more compact because of the high index-contrast of silicon;the silicon nitride AWG has good channel crosstalk and polarization performance.At the end of this paper,we describe the temperature and polarization insensitive AWGs,and forecast the future development trend of silicon photonic AWGs.
作者 陈晓铃 胡娟 张志群 马丽 陈华 方青 Chen Xiaoling;Hu Juan;Zhang Zhiqun;Ma Li;Chen Hua;Fang Qing(College of Science,Kunming University of Science and Technology,Kunming,Yunnan 650500,China;Department of Library,Kunming University of Science and Technology,Kunming,Yunnan 650500,China)
出处 《激光与光电子学进展》 CSCD 北大核心 2018年第12期110-118,共9页 Laser & Optoelectronics Progress
基金 国家自然科学基金(61764008 61674072 51304097) 集成光电子学国家重点实验室开放课题(IOSKL2017KF11)
关键词 集成光学 阵列波导光栅 硅光子学 硅纳米线 氮化硅 integrated optics arrayed waveguide grating silicon photonics silicon nanowire silicon nitride
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