摘要
根据磁光非互易相移原理,通过分析硅基磁光波导中导波光模式对磁化强度的敏感性,提出一种Ce YIG/Si-Ce YIG/SiO2硅基磁光波导结构,仿真分析了其模场分布和有效折射率的磁化强度依赖关系。将两个硅基磁光波导垂直放置并分别组成两个微环谐振器,进而设计出三维磁场传感芯片,通过测量两个微环中TE和TM两种模式下微环谐振波长的移动,可获得磁化强度或磁场的大小和方向信息。研究表明,在1 550nm波长附近,通过优化波导截面尺寸,在Ce YIG饱和磁化范围内,该磁场传感芯片在其法向和切向的磁场灵敏性分别为和,谐振波长的可移动范围约为200pm。利用平面芯片结构实现了对三维磁场的测量,对三维磁场传感器件的小型化和集成化具有一定的指导意义。
According to the principle of magneto-optical(MO)nonreciprocal phase shift,along with the sensitivity of different guided wave modes to magnetization in silicon-based magneto-optical waveguides,a new silicon-based waveguide structure of Ce YIG/Si-Ce YIG/SiO2 to form the microring resonators is presented,and the magnetization dependences of its mode field distribution and effective refractive index are simulated.A three-dimensional magnetic field sensor chip is designed by using two micro-ring resonators,in which the silicon-based magneto-optical waveguides are perpendicularly placed each other.The magnitude and direction of magnetization or magnetic field can be determined by their resonant wavelength shifts for the TE and TM modes.The simulated results show that the magnetic sensitivity of this sensor chip at the wavelength of 1 550 nm are respectively 0.080 pm/[(kA/m)·μm]and 0.105 pm/[(kA/m)·μm]in the normal and tangential directions in the range of saturation magnetization for Ce YIG material,and the measurable resonant wavelength shift is up to 200 pm at the saturation magnetization.The planar chip structure is usd to achieve the measurement of three-dimensional magnetic fields,which has a certain guiding significance for the miniaturization and integration of three-dimensional magnetic field sensor devices.
作者
倪双
武保剑
刘亚文
NI Shuang;WU Bao-jian;LIU Ya-wen(Key Laboratory of Optical Fiber Sensing &Communication of the Ministry of Education,University of Electronic Science and Technology of China,Chengdu 611731,China))
出处
《光学与光电技术》
2018年第6期18-24,共7页
Optics & Optoelectronic Technology
基金
国家自然科学基金(61671108)资助项目
关键词
磁场传感
磁光非互易相移
微环谐振器
硅光子芯片
集成光器件
magnetic field sensing
magneto-optical non-reciprocal phase shift
microring resonator
silicon photonic chip
integrated optical device
