摘要
对几种可用于ＭＥＭＳ电容式开关中的弹性薄膜材料进行了分析，含硅４％的轻质量铝合金具有较佳的性能。应用该弹性膜制备了微波ＭＥＭＳ电容式开关，实验结果表明，开关具有较低的激励电压，约为２８Ｖ，在１０ＧＨｚ处的隔离度大于１５ｄＢ。
This paper presents several different membranes that can be used in MEMS microwave capacitance switch. A lot of experiment result was analyzed and theoretical values were calculated. At last, Al0.96Si0.4 alloy exposed the best performance. The pulling-down voltage of the MEMS switch was about 28V and the isolation was over 15dB at 10GHz.
出处
《半导体技术》
CAS
CSCD
北大核心
2001年第12期75-77,共3页
Semiconductor Technology
基金
国家973项目<集成微光机电系统研究>(G1999033105)
国家自然科学基金(69876012)
国家杰出青年基金(6
