摘要
就镍薄膜热电阻研制过程中的选材、工艺、稳定性等问题进行了探讨 ,实验结果表明 :可以选用国产 0号镍 ,采用 S-枪磁控溅射技术制备镍薄膜热电阻 ;合适的热处理工艺是保证电阻温度系数α值及其一致性的关键 ;
Discussed some key aspects such as material selection, preparation method, and stability improvement in developing Nickle\|film thermal resistance. The results show that 0# Nickle can be used as candidate material for developing Nickle\|film thermal resistance and S\|gun magnetron sputtering the appropriate preparation method. Applying heat treatment and additional ultrathin organosilicon films deposition can keep temperature coefficient \%α\% at certain high value and uniform, thus further improve long\|term stability.
出处
《浙江大学学报（工学版）》
EI
CAS
CSCD
北大核心
2002年第1期66-68,共3页
Journal of Zhejiang University：Engineering Science
