摘要
用溶胶 -凝胶法制备VO2 薄膜。通过熔融、涂膜、烘干和热处理等工艺实验 ,在非晶玻璃上得到电阻变化 2～ 3个量级的VO2 薄膜。对烘干温度、熔融温度、膜厚和热处理温度对薄膜电学性能的影响进行了初步研究。通过XRD和XPS对薄膜的特性和价态进行了分析。
A sol_gelmethod is described for preparing high_quality vanadium dioxide thin films which exhibit an abrupt resistivity change of 2～3 order of magnitude at about 60℃～80℃ on non_crystal substrate .The method consists of four processes:quenching ,coating,drying and vacuum heat treatment.These processes show strong effects on the properties of the final films.The effects of the drying ,quenching temperature and heat treatment time on the resistivity property of the films are studied.XRD(x_ray diffraction) and XPS(x_ray photoelectron spectroscopy)are used to study valence and characteristics of the films.
出处
《真空与低温》
2001年第4期207-210,214,共5页
Vacuum and Cryogenics
