摘要
阐述了微机械制造工艺制作红外热堆探测器的方法 ,其采用新的正面湿法腐蚀的方法释放体硅 ,获得悬梁结构的红外热堆探测器。该探测器用LPCVD(低压化学气相沉积 )氮化硅膜 ,与热氧化得到的氧化硅膜形成三明治结构作为热偶对的支撑结构 ;热偶材料采用多晶硅与金属。
A new approach of fabricating micromachined infrared thermopile detector is presented. Thermopile with cantilever structure was obtained by new front etch process. The detector was supported by a sandwich structure formed with LPCVD SiN layer and thermal oxidation SiO 2 layer. The thermocouples were composed of polysilicon and metal. Results show that it is a promising way to fabricate thermopiles.
出处
《微细加工技术》
2001年第4期61-64,共4页
Microfabrication Technology
基金
国家重点基础研究发展规划项目 (GI9990 3310 1)
