摘要
用离子束溅射和离子辅助淀积技术制备DWDM滤光片的关键问题是必须获得优良的膜层厚度均匀性。采用实验修正膜层厚度修正板的办法获得了较好的均匀性分布 ,给出了实验配置、实验方法和实验结果 。
The uniformity of layer thickness of DWDM filters is a key point. An excellent uniformity distribution is achieved by means of using a thickness trimming mask. Experimental setup, method and results of uniformity of layer thickness are presellted and discussed.
出处
《光学技术》
CAS
CSCD
2001年第5期410-412,共3页
Optical Technique
