摘要
随着MEMS产业重点从单个的MEMS器件向MEMS系统产品的转移 ,MEMS系统级模拟变得日益重要 .文中主要介绍了MEMS系统的一些结构化、标准化的设计方法以及MEMS系统建模与模拟的分级 ,重点阐述了MEMS器件级与系统级模拟之间的桥梁———宏模型的建立及系统级模拟的实现。
The focus of MEMS production has changed from the developmentof a single MEMS device to the development of a whole MEMS system.So the system level simulation of MEMS systems becomes more and more important.Structured CAD methodology for integrated MEMS design is introduced,together with the modeling and simulation level of MEMS systems.Emphasis is put on the generation of micro models and the realization of system level simulation.An example for the system level simulation of an accelerometer is finally given.
出处
《传感器技术》
CSCD
北大核心
2001年第10期57-60,共4页
Journal of Transducer Technology
基金
教育部科学与技术研究重点资助项目 ( 0 0 0 6 5 )
关键词
微电子机械系统
结构化设计
系统模拟
micro electronic mechanical system(MEMS)
simulation
structured design
micro model
