摘要
由于具有非接触、精度高、测量速度快的特点 ,多光束共焦测量已经成为一种重要的光学三维测量手段。文章分析了系统中存在的像差 ,并对第二类像差 (焦平面弯曲 )提出了测量和标定的方法 ,即通过测量平面镜来获取系统误差 ,通过对测量结果的球面拟合来进行标定 ,利用标定值即可进行系统误差的校正。采用此种方法可简化光学系统设计 ,降低系统制造费用。最后给出了试验的结果。
The multi-beam confocal system is an important 3D measurement because of its peculiarity such as non-contact, high precision and high speed. The system has two types of errors, one is the dispersion of the focus plane, the other is the bend of the focus plane. The article pays more attention to the latter because of its orderliness, and the former can be decreased to some acceptable degree by the accurate design of optics components. The method which is used to obtain the latter error is discussed in the article by measuring an ideal mirror. Because the surface of the latter error is just like a sphere, the sphere fitting technique is used to calibrate the error, and the fitting result is used to revise the error. With the method, the latter error is revised by software instead of hardware, which can simplify the optical system, and reduce the system cost.
出处
《半导体光电》
CAS
CSCD
北大核心
2001年第1期58-61,共4页
Semiconductor Optoelectronics
基金
西安交通大学在职博士基金项目
西安交通大学行动计划"MEMS智能仪器及其基础理论与技术"项目
