摘要
分析了影响多光束并行共焦三维探测系统特性的各种因素,并与传统的扫描共焦显微术进行了对比分析,给出并行共焦系统横向和纵向分辨率的判定依据和测量范围指标,讨论改善系统性能指标的各项关键技术与途径。介绍了研制的多光束并行共焦检测实验系统的构成,并给出初步实验结果。
Compared with the traditional scanning confocal microscopy, the effect of various factors on characteristic in multi-beam parallel confocal system is discussed. The criterion of axial and transversal resolution and measuring range is given. The key techniques and approaches for performance optimization are also demonstrated. The construction and working principle of the non-scanning 3-D detecting system is introduced, and some preliminary experimental results are obtained as well.
出处
《计量学报》
CSCD
北大核心
2004年第2期100-103,共4页
Acta Metrologica Sinica
基金
国家自然科学基金(50175024)
教育部科学技术研究重点基金(01103)
合肥工大科研发展基金(030101F)
关键词
计量学
共焦显微镜
并行检测
分辨率
微透镜阵列
Metrology
Confocal microscopy
Parallel detecting
Resolution
Microlens array
