摘要
通过对各种TiO2薄膜制备方法的对比,得到:磁控溅射法是目前制备TiO2薄膜的最佳方法;离子束溅射法和热解法尽管相关研究较少,但是值得进一步研究.
By comparing various methods used to prepare TiO2 films,it is found magnetron sputtering is the best method for the preparation of TiO2 films.Though ion beams puttering and pyrolysis methods are less reported,they are worth to be further studied.
出处
《云南师范大学学报（自然科学版）》
2014年第2期52-55,共4页
Journal of Yunnan Normal University:Natural Sciences Edition
关键词
二氧化钛
薄膜
制备
Titanium dioxide
Thinfilm
Preparation
