摘要
对光栅刻划机超精密定位系统的定位控制以及实验进行探索研究.鉴于控制模型和实验分析验证出光栅刻划机超精密定位系统具有较强的非线性和时变性,提出将基于BP神经网络的PID控制方法用于光栅刻划机定位系统控制,利用神经网络的自学习实时调节PID控制参数,实现精密定位的自适应控制.通过控制实验,稳定地获得了5nm以内的定位精度.
The control and experiment research of the precision positioning system of the grating ruling machine were presented. Considering the non-linearity and time-variation characteristics of the precision positioning system, PID feedback control based on BP neural network was utilized in the positioning system. With the functions of self-learning, the parameters of the PID controller were adjusted in real time, and precision positioning could be realize by the PID controller. Experimental result shows that a positioning accuracy within 5 nm was achieved.
基金
国家重大科研装备研制项目(ZBYZ2008-1)
安徽省自然科学基金(1308085QE92)
中央高校基本科研业务费专项资金(WK2090090010)
合肥师范学院人才基金(2013RCJJ04)资助
关键词
光栅刻划机
精密定位
BP神经网络
PID控制
grating ruling machine
precision positioning
BP neural network
PID control
