摘要
本文比较系统地介绍了激光在半导体微电子器件制造中的应用。对准分子激光器与光刻技术、激光图形发生,全息掩模与硅片检测、掩模缺陷激光修补与激光化学气相沉积,以及其它方面的一些激光应用作了比较详细的叙述。
The applications cf lasers in semiconductors and microelectronics are presented systematically in the paper, including excimer laser and photolithography, laser pattern generation, holographic mask and wafer inspection, laser repairing for masks and reticles, laser microphotochemical deposition and others.
出处
《光电工程》
CAS
CSCD
1991年第5期48-62,共15页
Opto-Electronic Engineering
关键词
半导体器件
制造
激光
激光器
光刻
Laser applications in industry
Laser photoetching
Excimer lasers
Laser detection of defect
Overview
