5Whitehouse D J. comparison between stylus and optical methods for measuring surfaces [ J ]. Annals of the CIRP, 1988,37 ( 2 ) : 649 -653. 被引量：1
6Dongmo S, Vautrot P, Bonnet N, et al. Correction of surface roughness measurements in SPM imaging[ J ]. Appl Phys A,1998 (66) : 819 -823. 被引量：1
7Binnig G, Quate C F, Gerder C H. Atomicforce microscope [ J ]. Phys Rev Lett,1986,56 (9) : 930 -933. 被引量：1
8Bariani P,Chiffre L De,Hansen H N,et al. Investigation on the traceability of three dimensional scanning electron microscope measurements based on the stereo-pair technique [ J ]. Precision Engineering,2005 ( 29 ) : 219 -228. 被引量：1
9Gehrtz M ,Strecker H ,Grimm H. Scanning tunneling microscopy of machined surfaces[ J]. Sci Technol A ,1988,6( 2 ) : 432 -435. 被引量：1
10Beckmann P, Spizzichino. The scattering of electromagnetic waves from rough surfaces [ M ]. London : Pergamon, 1963 : 12-43. 被引量：1
