摘要
简要地介绍了微悬臂梁传感器的工作原理和主要特性，着重介绍了微悬臂梁传感器动、静态工作模式下的理论分析方法和提高灵敏度的主要方法。微悬臂梁传感器在动态工作模式下灵敏度极高，但在液态环境下使用易受到液体阻尼效应的影响，只适于在空气中运行使用；相对于动态模式，静态模式受液体黏性的影响较小，更适于在液态中使用。
The working principle and main characteristics of micro-cantilever sensors are introduced,especially theoretical analysis of micro-cantilever sensor in dynamic and static operating mode, and the primary method to improve the sensitivity are disscussed.In the dynamic operating mode, Micro-cantilever sensor has a high sensitivity,but it is vulnerable to the damping effect of the liquid . Thus,the operation is only suitable for use in the air. Compared with the dynamic operating mode, static operating mode is more suitable for use in the liquid because of less influences resulted from the viscous.
出处
《纳米科技》
2013年第5期10-13,20,共5页
关键词
微悬臂梁传感器
工作模式
理论分析
灵敏度
影响因素
micro-cantilever sensor
operating modes
theoretical analysis
sensitivity
influencing factors
