摘要
采用微波等离子体化学气相沉积法在直径1～5 mm硬质合金球体上沉积了5～20μm厚的纳米金刚石膜。通过扫描电子显微镜、原子力显微镜和拉曼光谱对样品的表面形貌、膜厚均匀性和成份进行了表征。沉积膜表面呈现纳米金刚石典型"菜花"结构,晶粒度为10～20 nm,膜厚均匀,表面粗糙度随沉积膜厚度增加而增大。采用纳米压痕仪测试沉积膜硬度和弹性模量,沉积膜硬度接近40 GPa,弹性模量约为500 GPa。
Nanocrystalline diamond films with thickness of 5 μm to 20 μm were deposited by microwave plasma chemical vapour deposition(MPCVD) on tungsten carbide spheres.The films were characterized by a series of techniques including scanning electron microscope(SEM),atomic force microscope(AFM) and Raman spectroscopy.Nanocrystalline diamond films are typical 'cauliflower' structure with average grain size of 10-20 nm and homogeneous thickness around a sphere.The surface roughness increases with growing of film thickness.Mechanical properties of the nanocrystalline diamond films were also tested by nano-indentation.The hardness and elastic modulus are about 40 GPa and 500 GPa,respectively.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2013年第6期1016-1020,共5页
Journal of Synthetic Crystals
关键词
固体润滑
纳米金刚石
纳米压痕
solid lubrication
nanocrystalline diamond
nano-indentation
