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低频动态测试无线MEMS传感器的设计与传感特性研究

Design and sensing characteristic research of wireless MEMS sensor for low frequency dynamic testing
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摘要 针对传统有线传感器需要布置大量线缆进行测试而造成测试成本比较高、产生故障几率比较大的不足,采用模块化设计方法研发出一种新型的基于MEMS技术的无线传感器。对构成无线传感器的五大模块:信号检测模块、微控制器模块、存储器模块、无线收发模块及电源模块等硬件集成电路进行了设计,并进行了软件实现。设计实验系统对所研发的传感器动态特性进行了研究,实验结果表明:所研发的传感器动态响应速度快,具有良好的线性度、重复稳定性,适用于结构的低频振动测试。 Aiming at disadvantages of high test cost and greater mal-function probability of traditional wired sensors which need a large number of cables,a new kind of wireless sensor using modular design method based on MEMS technology is developed.The hardware integrated circuit five kinds of modules of wireless sensor which are signal detection module,micro-controller module,memory module,wireless transceiver module and power supply module are designed,and the software is implemented.The experimental system for this developed sensor is designed to study dynamic characteristic of sensor.The experimental results show that the developed sensor has such advantages as fast dynamic response,good linearity and repeatability,which is suitable for structural low frequency vibration measurement.
出处 《传感器与微系统》 CSCD 北大核心 2013年第6期9-11,14,共4页 Transducer and Microsystem Technologies
基金 国家高技术研究发展计划("863"计划)资助项目(2009AA11Z102) 河北省科技厅科技支撑计划资助项目(11213589) 河北省教育厅重点项目科研计划资助项目(ZH2012077 Z2012145)
关键词 MEMS技术 无线传感器 低频振动 MEMS technology wireless sensor low frequency vibration
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