摘要
多晶硅样品经氢氟酸和硝酸混合酸消解,采用电感耦合等离子体质谱法测定所得样品溶液中23种杂质元素的含量。通过调整分辨率来调整多原子离子对部分被测元素的干扰。方法的检出限(3s)在0.3～19.7ng.g-1之间。方法用于太阳能级多晶硅样品中23种元素的测定,回收率在85.2%～111%之间,相对标准偏差(n=11)在0.9%～4.6%之间。
The sample of polycrystalline silicon was treated with a mixture of HF and HNO3, and the contents of 23 impurity elements in the sample solution were determined by ICP-MS. Appropriate resolution ratio was selected to eliminate interference of polyatomic ion effect on part of the determined elements. Values of detection limit （3s） for the 23 elements were found in the range of 0. 3--19.7 ng · g^-1. The proposed method was applied to the determination of samples of solar energy-grade poIycrystalline silicon, giving values of recovery and RSD＇s （n=11） in the ranges of 85.2%-111% and 0.9%-4. 6% respectivelv.
出处
《理化检验（化学分册）》
CAS
CSCD
北大核心
2013年第5期556-558,562,共4页
Physical Testing and Chemical Analysis(Part B:Chemical Analysis)
基金
国家科技部资助项目(2009IM032300)
