摘要
对比不同的表面处理工艺,选择多弧离子镀方法在15-5PH不锈钢基材表面制备TiN硬质涂层。分析制备工艺对膜层的表面硬度、膜/基结合强度、膜层结构等基本物理性能的影响,进行工艺优化。结果显示在预热温度高于200℃后,TiN膜层结晶效果较好;负偏压达到600V后,膜/基间"伪扩散"层出现,膜/基结合性能明显提高;工作气压升高,膜层表面硬度、膜/基结合力和沉积速率先升高后下降,分别在4.0,3.0和2.5 Pa达到峰值。最终获得的TiN硬质膜层表面硬度大于2000HV0.05,膜/基结合力最小临界载荷高于70N。镀膜处理后,工件的各种性能测试均能满足具体使用要求。
The TiN hard films were deposited by multi-arc ion plating on 15-5PH stainless steel substrate.The influence of the coating conditions,such as the pressure,bias voltage,substrate temperature and deposition rate,on the microstructures and mechanical properties were evaluated.The TiN coatings were characterized with X-ray diffraction,energy dispersive spectroscopy,scanning electron microscopy,and conventional mechanical probes.The results show that the TiN film growth conditions strongly affect the mechanical properties.For example,as the pressure increased,the deposition rate,interfacial adhesion,and surface hardness,varied in an increase-decrease mode,maximizing at 2.5,3.0 and 4.0 Pa,respectively.At a substrate temperature above 200℃,crystallized grains dominated;at a bias of-600 V,the inter-diffusion markedly increased the interfacial adhesion.Under the optimized growth conditions,the TiN coatings displayed a surface hardness over 2000HV0.05 and the critical load of the interfacial adhesion higher than 70 N.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2013年第3期197-202,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(10775046)
国家自然科学基金项目(10875038)
中核集团预研基金项目(61601090502)
