摘要
通过等离子体基离子注入(PBII)表面改性的方法,采用不同的负脉冲偏压对Ti6Al4V合金进行氮/氟离子注入,并研究了改性层的结构、硬度以及摩擦磨损性能等。利用原子力显微镜研究了改性前后的表面粗糙度变化,并用X光电子能谱分析了改性层表面结构和化学组成,还使用力学显微探针分析试样的硬度,并用球盘式摩擦磨损实验仪和扫描电镜表征了摩擦磨损性能并观察了磨痕形貌。测试结果表明:氮氟离子注入改性试样粗糙度降低,并形成了由Ti O2,Ti F3,Ti F4和Ti N等组成的改性层;改性试样的纳米硬度值较未处理基体提高;氮氟离子注入试样表现出更好的弹性回复行为;改性试样摩擦系数和磨损体积均较基体下降,磨痕形貌从粘着磨损为主转变为磨粒磨损,耐磨性改善;注氟偏压-20 k V的试样获得最理想的性能。
The surfaces of Ti6Al4 V alloy were co-doped with N and F by plasma immersion ion implantation.The influence of the reaction conditions,including the bias voltage,contents of N and F,and implantation time,on the microstructures,phase-structures and tribological properties of the alloy was investigated X-ray photoelectron spectroscopy,scanning electron microscopy,atomic force microscopy and conventional mechanical probes. The results show that co-implantation of N and F ions significantly improved the mechanical behavior of Ti6Al4 V alloy. To be specific,the surface nano-hardness and elastic modulus increased,accompanied by decreases of the friction coefficient and wear rate,possibly because of a decrease of surface roughness and formation of Ti O2,Ti F3,Ti F4 and Ti N phases in the modified layers. Abrasive wear had a major impact. F-ion-implanted at-20 k V,the Ti6Al4 V alloy displayed the best tribologicalbehavior of the samples.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第11期1279-1285,共7页
Chinese Journal of Vacuum Science and Technology
