摘要
碳纳米管的制备方法有电弧法、激光蒸发法、化学气相沉积法(CVD法)、火焰法、水热法和模板法等。主要介绍了等离子体化学气相沉积法制备碳纳米管,并对此方法制备的碳纳米管形貌进行了表征,最终优化出最佳的实验工艺。
A variety of preparation methods of carbon nanotube were used, which are the arc dis- charge technology, laser vaporization, chemical vapor deposition, flame technology, hydrothermal technology, template technology, and so on. The plasma enhanced chemical vapor deposition tech- niques （PECVD） was focused details. The morphology of CNTs have been evaluated by scanning e- lectron microscopy （SEM）. At last,the optimized process parameters for CNTs were obtained.
出处
《江西科学》
2013年第2期140-142,共3页
Jiangxi Science
基金
陕西省教育厅科研基金资助项目(12JK0989)
陕西省教育科学规划项目(SGH12433)
关键词
碳纳米管
PECVD
催化剂
Carbon nanotubes, Plasma enhanced chemical vapor deposition, Catalyst
