摘要
在介质阻挡放电装置中,使用阻抗匹配网络后,当气体间隙为3mm时,在大气压氮气中获得了均匀介质阻挡放电等离子体,放电模式为汤森放电。在其他放电参数不变的情况下,放电电流和放电功率随着外加电压峰峰值的增大先非常缓慢增加,然后当放电面积铺满整个电极后呈线性增加。而放电电流和放电功率随驱动频率的增加呈现出非常明显的谐振现象,实验所得到的最佳匹配频率和Chen给出的理论计算结果存在差异。
The fairly homogeneous plasma was generated by dielectric barrier discharge（BDB）in the 3 mrn gap filled with atmospheric pressure nitrogen, and regulated withthe impedance matching network. The impacts of the discharge con- ditions on plasma characteristics were evaluated. The discharge was found to be Townsend mode. The results show that at a given frequency and gas-gap width, as the amplitude of driving voltage increased, the discharge current and discharge power increased at different rates, a fairly slow increase, followed by a linear increase after the discharge area covered the entire electrode. Besides, an increase of frequency resulted in an observable resonance of the discharge current and pow- er. However, the experimentally optimized driving frequency was found to disagree with the simulated result reported by Cben et al.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2013年第4期342-345,共4页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(批准号:10575019
50975080
u12041506)
关键词
介质阻挡放电
阻抗匹配
均匀放电
Dielectric barrier discharge, Impedance matching, Homogeneous discharge
