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微空心阴极放电自持的辉光放电的理论及实验 被引量:1

Theoretical and experimental research of glow discharge sustained by the micro hollow cathode discharge
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摘要 利用蒙特卡洛方法模拟了微空心阴极放电(MHCD)出射电子的空间以及能量分布,并在此基础上模拟了微空心阴极放电自持的辉光放电中电子的空间分布.模拟表明减小MHCD绝缘层厚度,能有效地改变从微空心阴极放电中出射电子的能量分布,从而提高电子发射效率.对于给定的微空心阴极放电电压,电子的发射存在一个轴向电压阈值;轴向电压的进一步增加,出射的电子数会达到饱和.实验表明以MHCD作为辉光放电电子源是可行的,并且微空心阴极放电自持的辉光放电特性的实验结果和理论模拟是一致的. A Monte Carlo model was used to simulate the spatial and energy distribution of the emission electrons from the micro hollow cathode discharge (MHCD), based on these results, spatial distribution of the electron in the micro hollow cathode sustained glow discharge was also modeled. The results showed that it can improve the electron energy distribution from the MHCD by reducing the dimension of the MHCD, so the electron emission efficiency can be improved. For a given voltage of the MHCD, there is a threshold axial voltage for the emission of the electrons; but the further increasing of the axial voltage will saturate the emission electrons. Experimental results showed that it is feasible to use MHCD as the electron sources for the glow discharge, and the discharge characteristics of the micro hollow cathode sustained glow discharge predicted from the model are in agreement with the experiment results.
出处 《华中科技大学学报(自然科学版)》 EI CAS CSCD 北大核心 2005年第9期91-93,共3页 Journal of Huazhong University of Science and Technology(Natural Science Edition)
基金 国家自然科学基金资助项目(50007003).
关键词 辉光放电 微空心阴极放电 蒙特卡洛模拟 等离子体阴极 glow discharge micro hollow cathode discharge Monte Carlo model plasma cathode
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