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激光加工SiC密封表面润湿特性实验研究 被引量:5

Experimental Research on Wettability of Laser Processed SiC Surface
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摘要 通过对激光加工前后碳化硅(SiC)表面接触角进行测试,研究了激光加工对密封环表面的润湿性能的影响。采用光纤激光器制备不同形貌的SiC表面。分别采用三维白光干涉仪和拉曼光谱分析仪测定表面几何形貌及化学成分。采用Dataphysics光学视频接触角测量仪,用座滴法进行接触角的测量。结果表明,激光加工之后,表面粗糙度明显增加,使表面疏水性增强,接触角由88.7°增长到111.3°;对于加工有微孔形貌的SiC表面,水滴迅速填充孔区部位,接触角迅速减小,直至充满孔区。 The influence of laser processing on the wettability characteristic of silicon carbide (SiC) surfaces was studied through testing the surfaces' contact angle before and after laser processing. Different morphologies of SiC surfaces were fabricated by fiber optic laser, and the 3D geometric white interferometer and Raman spectrometric, respectively. tact angle analyzer using sessile drop method. Experiment morphology and chemical composition were measured by 3D The contact angles were measured by Dataphysics video con- results show that the roughness of SiC surface is increased through laser processing, the hydrophobic behaviors are improved, and the contact angle is increased to 111.3° after laser processing, compared with 88.7°on the smooth surface. On the micro-porous SiC surfaces, the hole is immersed quickly by drop, and the contact angle is reduced quickly until the hole is filled with drop .
出处 《润滑与密封》 CAS CSCD 北大核心 2013年第3期41-43,共3页 Lubrication Engineering
基金 国家自然科学基金资助项目(51175470 51275473) 浙江省公益性技术应用研究计划项目(2011C21010) 清华大学摩擦学国家重点实验室开放基金资助项目(SKLTKF11B01)
关键词 干气密封 碳化硅 润湿性 接触角 dry gas seal silicon carbide wettability contact angle
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