摘要
OEM硅压力传感器除具有普通扩散硅压力传感器的灵敏度高、稳定性好等优点外 ,还具有体积小、价格低廉 ,易于批量生产等特点 ,成为市场的主导产品。文中对多种OEM硅压力传感器的温度特性曲线及其补偿电路进行测试、比较、分析 ,对传感器温度曲线可补偿性进行研究 ,实现了低温度系数厚膜网络温度补偿。
OEM silicon pressure sensor has become the dominant product in industry because of its aduantages such as excellent sensitivity and stability,small size,low cost and ease of mass production.In this paper,the temperature property of OEM silicon pressure sensor and its compensation circuit is discussed and analysed,and a method of temperature compeasation is presented.
出处
《仪表技术与传感器》
CSCD
北大核心
2000年第7期9-11,共3页
Instrument Technique and Sensor
