摘要
为了消除HF酸差动腐蚀法测试中环境因素对测试精度的影响,提出了HF酸分步腐蚀法,并引入修正系数Ki来对不同腐蚀阶段的环境变化做适当的修正以提高测量精度。采用HF酸分步腐蚀法测量了固结磨料抛光垫(FAP)研磨后K9玻璃的亚表面损伤层深度,并与HF酸差动腐蚀速率法和磁流变抛光斑点法的测量结果进行了对比研究。结果显示,用本文提出的方法测量得到的亚表面损伤层深度为3.479μm,其他两种测量方法测得的结果分别为0.837μm和2.82μm。测量结果表明,分步腐蚀法的测量精度更高,其结果更加符合实际情况。另外测试中引入了实验校正系数Ki,很大程度上减少了操作环境及重复操作带来的累积误差。
To remove the effect of environmental conditions on the measuring accuracy of HF acid differential corrosion rate method,a HF step-by-step etching method was proposed.The correction factor Ki was introduced to correct the environmental changes in different etching steps and to improve the measuring accuracy.Experiments show that the sub-surface damage layer depth of the K9 glass after Fixed Abrasive Pad（FAP） lapping is 3.479 μm measured by the HF step-by-step etching method.As compared with 0.837 μm and 2.82 μm measured by the HF acid differential corrosion rate method and the magneto-rheological finishing spot method,respectively,it demonstrates that the proposed method in this paper has higher measurement accuracy and is in well accordance with the actual situation.Furthermore,the introduction of experimental correction factor Ki reduces the accumulation errors brought by the operating environments.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2013年第2期287-293,共7页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.51175260
50905086)
江苏省自然科学基金资助项目(No.BK2010512)
