摘要
基于超声扫描显微镜,在基本的反射扫描方式基础上开发出厚度测量扫描方式。作为实验室中的无损测厚工具,可以精确测量器件或器件中某材料层的厚度。
This paper invents the thickness measurement scanning on the foundation of echo scanning based on the Scanning Acoustic Microscope. As a tool of non-destructive thickness measure in the laboratory, it can accurately measure the thickness of a part or one material layer in the part.
出处
《电子工业专用设备》
2013年第1期30-33,共4页
Equipment for Electronic Products Manufacturing
关键词
超声扫描显微镜
厚度测量
扫描方式
Scanning Acoustic Microscope
Thickness Measurement
Scanning mode
