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高效、高分辨光纤微探针的制备及检验 被引量:15

Fabrication and Characterization of Fiber-Optic Nano-Probes with High Transmission Efficiency and High Resolution
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摘要 提出两种同时满足高分辨、高传光效率的探针模型以及制备方法 :先用自制热拉装置将光纤拉制成过渡区为双曲线或抛物线形的探针 ,然后用 4 0 %氢氟酸进行快速腐蚀 ,使探针孔径变小而保持过渡区域形状和锥度基本不变。所获探针孔径变化范围为 2 0~ 2 0 0 nm,锥度 2 0°~ 6 0°。为检验探针性能 ,将两种探针的出射光分布与用传统热拉法所得到探针进行对比 ;探测了光子扫描隧道显微镜状态下的倏逝波衰减曲线 ;给出了用集光式扫描近场光学显微镜得到的近场光学图像 ;同时 ,验证了探针对剪切力控制的适用性。 Two probe models are presented,which satisfy the conditions of high optical reso- lution together with high transmission efficiency.A two- step method to fabricate the two kinds of probes is proposed.First,an optical fiber probe with the transitional taper in hyper- bolic or parabolic shape is produced by heating- pulling method in a simple home- made de- vice,followed by a rapid chemical etching in40 % buffered hydrofluoric acid to sharpen the tips,keeping the shape and conic angle unchanged. The tips diameters are in the range of 2 0 ~ 2 0 0 nm,and the taper angle 2 0°~ 6 0°. To demonstrate the performance of high transmis- sion efficiency of the tips,their spot distributions are compared with conventional taffy- pulled probes.The evanescent wave decay curve in PSTM mode and the scanning near- field image of holographic grating are given by use of transmission SNOM working in collection mode.In addition,an approach curve of shear force is shown to verify its applicability to tip- sample distance regulation based on the shear- force principle.
出处 《光学学报》 EI CAS CSCD 北大核心 2000年第5期659-665,共7页 Acta Optica Sinica
基金 国家自然科学基金!(394 70 2 0 4 )资助项目
关键词 扫描近场光学显微镜 光子扫描隧道显微镜 扫描探 scanning near- field optical microscope, photon scanning tunneling microscope, optical transmission efficiency, scanning probe
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