期刊文献+

Fabrication of SiC nanowire thin-film transistors using dielectrophoresis

Fabrication of SiC nanowire thin-film transistors using dielectrophoresis
原文传递
导出
摘要 The selection of solvents for SiC nanowires(NWs) in a dielectrophoretic process is discussed theoretically and experimentally.From the viewpoints of dielectrophoresis force and torque,volatility,as well as toxicity, isopropanol(IPA) is considered as a proper candidate.By using the dielectrophoretic process,SiC NWs are aligned and NW thin films are prepared.The densities of the aligned SiC NWs are 2μm^(-1),4μm^(-1),6μm^(-1),which corresponds to SiC NW concentrations of 0.1μg/μL,0.3μg/μL and 0.5μg/μL,respectively.Thin-film transistors are fabricated based on the aligned SiC NWs of 6μm^(-1).The mobility of a typical device is estimated to be 13.4cm^2/(V·s). The selection of solvents for SiC nanowires(NWs) in a dielectrophoretic process is discussed theoretically and experimentally.From the viewpoints of dielectrophoresis force and torque,volatility,as well as toxicity, isopropanol(IPA) is considered as a proper candidate.By using the dielectrophoretic process,SiC NWs are aligned and NW thin films are prepared.The densities of the aligned SiC NWs are 2μm^(-1),4μm^(-1),6μm^(-1),which corresponds to SiC NW concentrations of 0.1μg/μL,0.3μg/μL and 0.5μg/μL,respectively.Thin-film transistors are fabricated based on the aligned SiC NWs of 6μm^(-1).The mobility of a typical device is estimated to be 13.4cm^2/(V·s).
出处 《Journal of Semiconductors》 EI CAS CSCD 2012年第11期37-42,共6页 半导体学报(英文版)
基金 supported by the National Natural Science Foundation of China(Nos.50730008,60807008) the Doctoral Fund of Hebei Normal University of Science and Technology,China(No.2009YB007)
关键词 dielectrophoresis SiC nanowires thin-film transistors dielectrophoresis SiC nanowires thin-film transistors
  • 相关文献

二级参考文献1

共引文献5

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部