摘要
组成电真空器件的金属零件在机加等过程中表面要沾污到一些油污,如果零件没有得到有效的去油清洗,带有残留污染物的零件装配到高真空环境中,可能成为大量气体和蒸气的来源,影响器件的真空度和使用寿命。结合零件表面油污种类、特性,对两种去油方法进行对比:通过洁净度测试、真空热处理和XPS表面残留分析测试结果,说明含活性剂成分的水基清洗液对表面沾污皂化油和非皂化油类的零件清洗效果好,安全无残留,适合高要求的电真空金属零件的去油清洗。
Oil can contaminate the metal parts of electronic vacuum device in machining process. If the metal parts are not degreased effectively, they may produce a large amount of oil vapour which affects the vacuum degree and working life significantly when assembled into the high vacuum environment. Two degreasing methods were compared based on the kind and characteristic of oil. The cleanliness test, vacuum heat treatment and XPS residues analysis results show that the water-based cleanout fluid containing surfactant has a good effect in rinsing the parts defiled by non-saponifiable oil and saponifiable oil. It suits the degreasing of metal parts in high electronic vacuum.
出处
《真空》
CAS
2012年第6期79-82,共4页
Vacuum
关键词
电真空器件
金属零件
去油
皂化油
非皂化油
洁净度
真空热处理
XPS
表面活性剂
electronic vacuum device
metal parts
degrease
saponifiable oil
non-saponifiable oil
cleanliness
vacuum heat treatment
XPS
surfactant.
