摘要
介绍了扫描电镜中的一种背散射电子采集和测量系统 ,该系统能探测那些较低能量损失且散射角接近 1 80°的背散射电子。测量了在Au、Pt、Ag和C靶中的低失能近轴背散射电子的背散射率。结果显示该探测系统比常规电镜中的探测系统具有更高的成分衬度 ,因此在靶成分的分析中有广阔的应用前景。
We present in this paper a detection and measure system of the backscattered electrons.This system can collect the backscattered electrons having low loss energy and diffusion angle near 180°.We have measured the corresponding backscattering coefficients in Au,Pt,Ag and C targets.The results show that this detection system has a better atomic number contrast than the detection system in the conventional scanning electron microscope.So this detection system will be applied to the target composition analysis in the future.
出处
《微细加工技术》
EI
2000年第3期18-21,17,共5页
Microfabrication Technology
基金
国家自然科学基金资助项目 !(批准号 :10 0 4 50 0 1)
国家自然科学基金
留学回国人员启动基金
武汉大学邵逸周先生研究基金的资
关键词
背散射电子
近轴深测
成分分析
扫描电镜
backscattered electron(BSE)
coaxial detection,composition analysis
scanning electron microscope(SEM)
