摘要
椭偏光学显微成像是近几年发展起来的一种超薄膜及表面结构显示技术 ,它不仅为分子生物学、生物医学 (尤其是分子生物医学 )及分子生物材料学等领域提供了一种新的研究手段 ,而且在临床疾病诊断、微电子器件及纳米材料检测等方面具有潜在的应用前景。本文针对椭偏光学显微成像系统及其成像 (简称“椭偏成像”)特点 ,提出了扩展图像量化等级法、快速采样—时间积分法和多采样点平均法以改善椭偏成像质量和样品表面定量分析的可靠性 ,并给出理论分析及实验结果。这些图像采集和图像处理技术在椭偏光学显微成像系统中行之有效 ,同时也适用于类似的图像处理系统。
WT5BZ]Ellipsometric imaging, which has been developed during recent years, is a kind of technique for visualizing the superthin layer distribution and surface structure. It not only supplies a new tool for studying molecule biology, bio medicine (especially molecule bio medicine) and bio molecule materials science, but also has promising applications in disease diagnosis and examination of micro electronic elements and nano materials. In order to improve the quality of images, Expanding Pixel Bit depth and Fast Grabbing and Time Averaging, as well as Averaging Over Pixels are proposed. Above methods have been proved effective in the system with some experiment results. These methods may be used in some similar imaging systems.[WT5HZ]
出处
《光学精密工程》
EI
CAS
CSCD
2000年第4期316-320,共5页
Optics and Precision Engineering
基金
国家自然科学基金!资助项目 ( 696780 2 7)
