摘要
MEMS梳齿位移传感器是一种基于MEMS技术电容理论的传感器,具有体积小、重量轻、性能稳定、功耗低和易于集成等特点。首先探讨了梳齿传感器的工作原理,随后介绍了使用梳齿传感器有效检测微动工作台位移的方法,并进行了结构失效和梳齿电极不平行失效的可靠性分析。通过采用这种传感器可以达到提高微位移定位平台系统的集成度、精度、分辨率和减小定位平台系统体积的目的。
Based on MEMS technology and capacitance theory, MEMS comb displacement sensors have the features of small size, light weight, stable performance, low power consumption , ease of integration and so on. Firstly, the working principle of MEMS comb displacement sensors is discussed. And then the effective methods for detecting the displacements of micro platforms using comb sensors are introduced. Finally, reliability analysis of structural failure and the unparallel-comb-electrode failure are discussed. By means of this kind of sensor, the purposes of increasing integration, accuracy, resolution of micro-positioning platforms and decreasing the volume of platform systems can be achieved.
出处
《传感器世界》
2012年第9期7-10,共4页
Sensor World
