摘要
随着精密光学加工要求的提高,机床热变形已成为制约精度等级进一步提高的关键因素,而与机床直接接触的相关液体的温控也越来越凸显其重要位置。本文首先深入分析了液体温控的难点,然后针对这些难点,从温度控制方法、测温元件补偿算法和温控结构等方面分别阐述了目前常用解决方法,同时给予了客观的评价。最后对高精度液体温控的关键问题进行了总结,并为进一步研究指明了方向。
With the improvement of the precision optical processing requirements, the thermal deformation of the ma- chine becomes the key factor which restricts the precision grades to further improvement.And the temperature control of the related liquid which contact with the machine directly also becomes more and more important.Firstly, the difficulty of the liquid temperature control is analyzed deeply in this paper.Then based on these difficulties, common used methods at present are expounded respectively as these aspects： temperature control methods, temperature sensor compensation al- gorithm and temperature control structure.The objective evaluation is also given at the same time.Finally, the key prob- lems of the high precision liquid temperature control are summarized, and the direction for further research is pointed out.
出处
《长春理工大学学报（自然科学版）》
2012年第2期48-52,共5页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
国家科技重大专项项目(2009ZX02205)
关键词
温度控制
大惯性
控制算法
动态补偿
temperature control
great inertia
control algorithm
dynamic compensation
