摘要
利用磁控溅射方法制备了不同厚度和退火处理的Ni薄膜.表面磁光克尔效应研究表明:冷基底无退火处理的Ni薄膜为软磁性,退火处理的Ni薄膜为铁磁性质,且无退火处理的Ni金属膜磁性随膜厚的增加而增强.分析认为,冷基底条件下Ni膜是非晶态生长,且膜内存有大量缺陷,经退火处理的Ni膜发生了重融再生长,形成了大颗粒结晶,膜内晶粒内缺陷大量消失.
The nickel films were prepared by magnetron sputtering. The surface magneto-optic Kerr effect （SMOKE） of the films indicated that the unannealed films showed the property of the soft magnetic materials whose magnetism could he enhanced with the increase of sample thickness, and on the otherwise the annealed films showed the property as ferromagnetic materials. The reasons of this phenomenon may be that the deposition process of the films prepared by magnetron sputtering was an amorphous growth process with a low temperature base and conditions. In contrast, the anneal opera- tion made the crystal particles of nickel films melt and re.row.
出处
《物理实验》
2012年第8期30-33,共4页
Physics Experimentation
关键词
Ni薄膜
磁控溅射
表面磁光克尔效应
非晶态生长
重融再生
nickel film magnetron sputtering surface magneto-optic Kerr effect amorphous growth
crystal regrowth
