摘要
为了实现工业技术领域的微纳牛级力大小的精确测量,以厚度约700nm、直径50mm左右的球形薄膜为敏感元件,将微纳牛级待测微粒置于球膜上,根据球膜变形量得出被测微粒的重力大小;利用ANSYS建立球形薄膜的力学模型,根据正交试验法设计试验工况,对球膜进行多种工况的受力分析;采用奇异值分解的最小二乘拟合算法处理试验数据,得出变形量、球膜参数以及微粒子重力之间的拟合公式;将拟合公式计算出的变形量理论值与对应试验值进行比较,结果表明:载荷在2～10μN范围内,检测误差不超过1%。
In order to realize the precise measurement ot the nN-levet mtcro-foree in tne maus- trial technological field,a kind of spherical film,with about 700nm thick and around 50ram in diame- ter,was used as sensitive component. Distort will be formed when nN--level particles were put on the spherical film. According to the deformation of spherical film,we can get the gravity of the particle. By using the ANSYS so^tware,a mechanics model of the spherical film was built. Adopting the orthogo nal experimental method to design some experimental situations, then mechanics analysis of the spher- ical film was processed in these situations. And then the experimental results were manipulated by u- sing the least square fitting algorithm that was based on the singular value decomposition. Further- more, fitting formula was obtained to describe the relationship of deformation, the parameters of spherical film, and the gravity of particles. Comparing the experimental data from situations and the calculating data from fitting formula,we can conclude that when controlling the force in the range of 2-10μN the detecting error will be less than 1%.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2012年第16期1978-1981,共4页
China Mechanical Engineering
基金
国家自然科学基金资助项目(51005122)
南京航空航天大学基本科研业务费专项科研项目(Y1034-053)
航空科学基金资助项目(2008ZE52049)
关键词
球膜变形量
微纳牛级力
球膜直径
球膜厚度
spherical film deformation
nN -- level force
spherical film diameter
spherical filmthickness
