摘要
在MEMS器件中应用的各类薄膜材料在制备过程所产生的残余应力,对器件的性能和可靠性具有较大的影响.设计了一种用于残余应力在线检测的柔性铰链放大机构,并对柔性铰链的结构尺寸与放大机构的角变形和转动刚度的关系进行理论建模,利用FEA软件对3种不同类型柔性铰链的转动刚度进行了数值仿真,为用于残余应力检测的微指针结构的放大机构的优化设计提供了前期研究基础.
Applications in MEMS devices of all kinds of thin films produced. The residual stress formed in the thin films applied in MEMS devices during the preparation, its performance and reliability has a great impact on the devices. A flexible hinge amplification mechanism for on line detection of residual stress was designed,and theoretical modeling between the relationship of the flexible hinge structure, size and the amplification mechanism of angular distortion and the rotation stiffness was constructed. The rotational stiffness of the three-type flexible hinges was simulated with FEA. Based on theoretical modeling and numerical simulation, the amplification mechanisms for residual stress detection system were analyzed, which provided a basis for preliminary study.
出处
《安徽工程大学学报》
CAS
2012年第2期58-62,共5页
Journal of Anhui Polytechnic University
基金
安徽省高校青年教师基金资助项目(2008jq1080)
安徽省高校自然科学基金资助项目(kj20098119)
安徽工程大学科研启动基金资助项目(2006yqq001)
