摘要
为解决纳米技术中体积紧凑、高分辨率的测角问题 ,分析了表面等离子体波共振 ( SPR)的相位和振幅特征 ,根据共振角附近 SPR的相位对入射角的高度敏感性 ,提出了基于表面等离子体波共振原理进行微小角度测量的方法 ,它具有测量分辨率高和体积紧凑的优点。研制了实验装置并进行了测角实验 ,测量分辨率达 1.4× 10 -7rad,长期稳定性偏差为 4.8× 10 -7rad。该方法可满足纳米机械的测角要求。
To solve the problem of compact and high resolution angle measurement which is required by the development of nanotechnology, the phase and the amplitude behaviors of surface plasmon resonance (SPR) were discussed. Based on the high sensitivity of the phase of SPR to the incident angle in the vicinity of the resonance angle, a novel principle for tiny angle measurement which has merits of compact size and high resolution was presented. The experimental setup was established. An angular resolution of 1.4×10 -7 rad and a long term drift 4.8×10 -7 rad are achieved in a laboratory environment. This method is able to satisfy the requirement of angle measurement in nanotechnology.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2000年第2期12-14,18,共4页
Journal of Tsinghua University(Science and Technology)
基金
国家自然科学基金! ( 95 6 75 0 78)
关键词
角度测量
表面等离子体波共振
角度传感器
high resolution angle measurement
surface plasmon resonance
angular modulation
