摘要
为了实现对极紫外光刻投影物镜非球面反射镜的超高精度检测,引入了可见光移相点衍射干涉仪,介绍了其工作原理,并采用自行设计的十三步移相算法和传统五步移相算法对可见光移相点衍射干涉仪的测试误差进行了详细的理论分析及仿真计算,分析结果证明了十三步算法优越性的同时,也给出了要实现干涉仪的超高检测精度应该限定的测试组件的性能参数。为了验证可见光移相点衍射干涉仪及十三步算法的切实可行性,搭建了原理实验装置,通过40次重复测量取平均值的方法获得被检元件面形。实验结果表明:十三步算法和五步算法的结果相近,但十三步算法的重复性优于五步算法。采用十三步算法,在所构建的实验装置上实现了RMS值优于λ/10 000(λ=632.8 nm)的检测重复性。
In order to measure the aspheric mirror of the EUVL projection objective with super high accuracy, the visible light phase shifting point diffraction interferometer （VL/PS/PDI） was introduced, and the working principle was introduced briefly. The self-designed 13-frame algorithm and the traditional 5-frame were used to analyse and calculate the measuring errors. The results show that the 13-frame is better than the 5-frame, and the parameters of the elements needed to satisfy the super high measuring accuracy of the interferometer are given. In order to verify feasibility of the VL/PS/PDI and the 13-frame algorithm, the experimental facility of the principle was built, the figure of the tested mirror was obtained by averaging 40 times of repeated measurements. The experimental results show that the results of the 5-frame algorithm and the 13-frame algorithm are approximate, but the repeatability of the 13-frame algorithm is better than that of the 5-frame algorithm. When the 13-frame algorithm is adopted, the root mean square（RMS） of the experimental facility is better than A/IO O00（）t=632.8nm）.
出处
《红外与激光工程》
EI
CSCD
北大核心
2012年第5期1351-1356,共6页
Infrared and Laser Engineering
基金
应用光学国家重点实验室资助项目(09Q03FQ090)
关键词
误差分析
十三步移相算法
移相点衍射干涉仪
光学检测
error analysis
13-frame phase shifting algorithm
phase shifting point diffractioninterferometer
optical testing
